Insulator interface effects in sputter‐deposited NbN/MgO/NbN (superconductor–insulator–superconductor) tunnel junctions

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Insulator interface effects in sputter . . deposited NbN / MgO / NbN ( superconductor - insulator - superconductor } tunnel junctions

All refractory, NbN/MgO/NbN (superconductor-insulator-superconductor) tunnel junctions have been fabricated by in situ sputter deposition. The influence ofMgO thickness (0.8-6.0 nm) deposited under different sputtering ambients at various deposition rates on current-voltage (IV) characteristics of small-area ( 30 X 30 pm) tunnel junctions is studied. The NbN/MgO/NbN trilayer is deposited in sit...

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ژورنال

عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

سال: 1987

ISSN: 0734-2101,1520-8559

DOI: 10.1116/1.574517